Inductively coupled plasma sources from Plasma ALD, LLC.


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S. Menzel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Menzel returned 3 record(s).

NumberTitle
1Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices
2Forming-free metal-oxide ReRAM by oxygen ion implantation process
3Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films