Benjamin Groven Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Benjamin Groven returned 6 record(s).

Number	Title
1	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
2	WS₂ transistors on 300 mm wafers with BEOL compatibility
3	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates
4	Understanding the EOT-J_g degradation in Ru/SrTiO_x/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
5	Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
6	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S