Scott G. Walton Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott G. Walton returned 7 record(s).

Number	Title
1	Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
2	Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
3	The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
4	Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
5	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
6	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
7	Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition