Hans-Georg Meyer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hans-Georg Meyer returned 4 record(s).

Number	Title
1	Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
2	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H₂/N₂ plasma
3	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
4	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition