Gregory L. Snider Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gregory L. Snider returned 4 record(s).

Number	Title
1	Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
2	Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition
3	Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
4	Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition