Do-Heyoung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Do-Heyoung Kim returned 4 record(s).

Number	Title
1	Highly Conductive HfN_x Films Prepared by Plasma-Assisted Atomic Layer Deposition
2	Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
3	Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O₂ plasma
4	Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten