Sydney C. Buttera Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sydney C. Buttera returned 4 record(s).

Number	Title
1	Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition
2	Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
3	Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
4	In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition