Inductively coupled plasma sources from Plasma ALD, LLC.


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M. Hermle Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Hermle returned 3 record(s).

NumberTitle
1Minority carrier lifetime limitations in Si wafer solar cells with gallium phosphide window layers
2Electron-selective contacts via ultra-thin organic interface dipoles for silicon organic heterojunction solar cells
3Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells