Mickaël Gros-Jean Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mickaël Gros-Jean returned 5 record(s).

Number	Title
1	Wideband frequency and in situ characterization of ultra thin ZrO₂ and HfO₂ films for integrated MIM capacitors
2	Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
3	Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
4	Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
5	PEALD ZrO₂ Films Deposition on TiN and Si Substrates