G. Bruce Rayner, Jr. Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by G. Bruce Rayner, Jr. returned 3 record(s).

Number	Title
1	Nucleation and growth of tantalum nitride atomic layer deposition on Al₂O₃ using TBTDET and hydrogen radicals
2	High quality HfO₂/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
3	Performance enhancement of InAsSb QW-MOSFETs with in-situ H₂ plasma cleaning for gate stack formation