Hong Liang Lu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hong Liang Lu returned 7 record(s).

Number	Title
1	Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets
2	Chemical, optical, and electrical characterization of Ga₂O₃ thin films grown by plasma-enhanced atomic layer deposition
3	Resistive switching properties of plasma enhanced-ALD La₂O₃ for novel nonvolatile memory application
4	Reactions of ruthenium cyclopentadienyl precursor in the metal precursor pulse of Ru atomic layer deposition
5	Systematic Study of the SiO_x Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiO_x/SiO₂ Super-Lattice
6	Direct Growth of Al₂O₃ on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
7	Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing