Ziwen Fang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ziwen Fang returned 4 record(s).

Number	Title
1	A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD
3	Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
4	Gadolinium nitride films deposited using a PEALD based process