Jin Ho Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jin Ho Lee returned 8 record(s).

Number	Title
1	Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
2	Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3	Low-Temperature Growth of SiO₂ Films by Plasma-Enhanced Atomic Layer Deposition
4	Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
5	Characteristics of TiO₂ Films Prepared by ALD With and Without Plasma
6	PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
7	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
8	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition