David J. Mandia Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David J. Mandia returned 3 record(s).

Number	Title
1	Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
2	Atomic Layer Deposition of Gold Metal
3	Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor