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David J. Mandia Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David J. Mandia returned 3 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
2Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
3Atomic Layer Deposition of Gold Metal