Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Michael A. Tarkhov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael A. Tarkhov returned 3 record(s).

NumberTitle
1A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
2Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
3Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure