Michael A. Tarkhov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael A. Tarkhov returned 3 record(s).

Number	Title
1	Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
2	A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
3	Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure