J. Brad Boos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Brad Boos returned 3 record(s).

Number	Title
1	Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al₂O₃
2	Atomic layer deposition of Al₂O₃ on GaSb using in situ hydrogen plasma exposure
3	Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment