Inductively coupled plasma sources from Plasma ALD, LLC.


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Eric W. Deguns Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric W. Deguns returned 3 record(s).

NumberTitle
1Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
2Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
3Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition