Bodo Kalkofen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bodo Kalkofen returned 6 record(s).

Number	Title
1	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
2	Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
3	Use of B₂O₃ films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
4	Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
5	Atomic Layer Deposition of the Conductive Delafossite PtCoO₂
6	Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds