Oh-Kyum Kwon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oh-Kyum Kwon returned 4 record(s).

Number	Title
1	Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
2	Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
3	PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
4	Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films