Jaan Aarik Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaan Aarik returned 4 record(s).

Number	Title
1	Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance
2	Integration of Atomic Layer Deposited Al₂O₃ Dielectrics with Graphene
3	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
4	Evaluation of Thermal Versus Plasma-Assisted ALD Al₂O₃ as Passivation for InAlN/AlN/GaN HEMTs