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Martijn F. J. Vos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martijn F. J. Vos returned 5 record(s).

NumberTitle
1Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
2Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
3Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
4Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
5Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant