Jaehyoung Koo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaehyoung Koo returned 6 record(s).

Number	Title
1	Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
2	Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3	Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
4	ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
5	Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
6	Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method