Yong Tae Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong Tae Kim returned 5 record(s).

Number	Title
1	Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
2	A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
3	Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
4	Effects of NH₃ pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
5	Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect