Yongchan Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yongchan Kim returned 4 record(s).

Number	Title
1	Effects of an Al₂O₃ capping layer on La₂O₃ deposited by remote plasma atomic layer deposition
2	Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO₂ Thin Films
3	Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO₂ for Nonvolatile Memory Devices
4	The Effects of Annealing Ambient on the Characteristics of La₂O₃ Films Deposited by RPALD