Inductively coupled plasma sources from Plasma ALD, LLC.


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Toh-Ming Lu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Toh-Ming Lu returned 4 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
2Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
3Plasma-Assisted Atomic Layer Deposition of Palladium
4Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces