Sung Soo Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sung Soo Kim returned 3 record(s).

Number	Title
1	Self-assembled monolayers as a defect sealant of Al₂O₃ barrier layers grown by atomic layer deposition
2	Defect-sealing of Al₂O₃/ZrO₂ multilayer for barrier coating by plasma-enhanced atomic layer deposition process
3	Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process