Inductively coupled plasma sources from Plasma ALD, LLC.


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Nadeemullah A. Mahadik Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nadeemullah A. Mahadik returned 3 record(s).

NumberTitle
1Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
2Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
3Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy