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The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

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Nadeemullah A. Mahadik Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nadeemullah A. Mahadik returned 3 record(s).

NumberTitle
1Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
2Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
3Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy