Sean W. King Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sean W. King returned 3 record(s).

Number	Title
1	Plasma enhanced atomic layer deposition of SiN_x:H and SiO₂
2	Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
3	Plasma Enhanced Atomic Layer Deposition of SiN:H Using N₂ and Silane