Duo Cao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Duo Cao returned 6 record(s).

Number	Title
1	Negative differential resistance in the I-V curves of Al₂O₃/AlGaN/GaN MIS structures
2	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
3	Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
4	Low-temperature plasma-enhanced atomic layer deposition of HfO₂/Al₂O₃ nanolaminate structure on Si
5	Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
6	Effects of rapid thermal annealing on the properties of HfO₂/La₂O₃ nanolaminate films deposited by plasma enhanced atomic layer deposition