Minseong Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Minseong Lee returned 3 record(s).

Number	Title
1	Impacts of conduction band offset and border traps on V_th instability of gate recessed normally-off GaN MIS-HEMTs
2	High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiN_x MIS structure
3	Improvement of V_th Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiN_x as an Interfacial Layer