Hyoung-Sang Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyoung-Sang Park returned 4 record(s).

Number	Title
1	PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
2	Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
3	Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
4	Plasma Enhanced Atomic Layer Deposition of Al₂O₃ and TiN