Myoung-Gyun Ko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Myoung-Gyun Ko returned 3 record(s).

Number	Title
1	Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
2	Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
3	Atomic Layer Deposition of La₂O₃ Thin Films by Using an Electron Cyclotron Resonance Plasma Source