TiON Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiON films returned 12 record(s).

Number	Title
1	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
2	Titanium Oxynitride Interlayer to Influence Oxygen Reduction Reaction Activity and Corrosion Stability of Pt and Pt-Ni Alloy
3	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
4	Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
5	Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
6	Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO₂
7	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
8	In-gap states in titanium dioxide and oxynitride atomic layer deposited films
9	Nitrogen-Doping of Bulk and Nanotubular TiO₂ Photocatalysts by Plasma-Assisted Atomic Layer Deposition
10	The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films
11	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
12	Analysis of nitrogen species in titanium oxynitride ALD films