Er₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Er₂O₃ films returned 6 record(s).

Number	Title
1	Er coordination in Y₂O₃ thin films studied by extended x-ray absorption fine structure
2	Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al₂O₃ for Photoluminescence Enhancement
3	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
4	Controlled erbium incorporation and photoluminescence of Er-doped Y₂O₃
5	Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
6	Radical-enhanced atomic layer deposition of Y₂O₃ via a beta-diketonate precursor and O radicals

Er2O3 Plasma Enhanced Atomic Layer Deposition Film Publications