Si Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Si films returned 5 record(s).

Number	Title
1	Atomic layer epitaxy of Si on Ge(100) using Si2Cl6 and atomic hydrogen
2	Electron-enhanced atomic layer deposition of silicon thin films at room temperature
3	Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
4	Atomic layer epitaxy of Si using atomic H
5	Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment