B₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing B₂O₃ films returned 3 record(s).

Number	Title
1	Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
2	Atomic layer deposition of B₂O₃/SiO₂ thin films and their application in an efficient diffusion doping process
3	Use of B₂O₃ films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon

B2O3 Plasma Enhanced Atomic Layer Deposition Film Publications