Contact Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 4 record(s).

Number	Title
1	Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
2	Impact of Post Fabrication Annealing PEALD ZrO₂ for GaN MOSFETs
3	In situ dry cleaning of Si wafer using OF₂/NH₃ remote plasma with low global warming potential