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Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

Type:
Journal
Info:
Materials Science in Semiconductor Processing 71 (2017) 433-440
Date:
2017-08-27
DOI:
https://doi.org/10.1016/j.mssp.2017.08.033

Author Information

Name Institution
Ph. RodriguezGrenoble Alps University (UGA)
R. FamulokGrenoble Alps University (UGA)
Y. Le FriecSTMicroelectronics
J.-Ph. ReynardSTMicroelectronics
B.-N. BozonApplied Materials
F. BoyerGrenoble Alps University (UGA)
K. DabertrandSTMicroelectronics
C. JahanGrenoble Alps University (UGA)
S. FavierGrenoble Alps University (UGA)
Y. MazelGrenoble Alps University (UGA)
B. PrevitaliGrenoble Alps University (UGA)
P. GergaudGrenoble Alps University (UGA)
F. NemouchiGrenoble Alps University (UGA)

Films

Plasma W

Hardware used: Applied Materials Volta
W(CO)6, tungsten hexacarbonyl, Joppa27TM (Entegris)
CAS#: 14040-11-0
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 180C

Film/Plasma Properties

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Napson WS-3000

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Jordan Valley JVX 5200

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku Smartlab

Characteristic: Compositional Depth Profiling
Analysis: PPTOFMS, Plasma Profiling Time Of Flight Mass Spectrometry
Diagnostic: Horiba Jobin Yvon Plasma Profiling Time Of Flight Mass Spectrome

Characteristic: Compositional Depth Profiling
Analysis: WDXRF, Wavelength Dispersive X-ray Fluorescence
Diagnostic: Rigaku AZX400 Sequential WDXRF Spectrometer

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-5500

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-5500

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Contact Resistance
Analysis: Two-point Probe
Diagnostic: -

Substrates

SiO2
W

Notes

1065