Gas Sensing Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Sensing returned 5 record(s).

Number	Title
1	Surface and sensing properties of PE-ALD SnO₂ thin film
2	From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
3	Gas sensing properties in epitaxial SnO₂ films grown on TiO₂ single crystals with various orientations
4	Effect of process parameters on surface morphology and characterization of PE-ALD SnO₂ thin films for gas sensing
5	SnO₂ nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance