Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Critical Current Density Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Critical Current Density returned 3 record(s).

NumberTitle
1Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
2A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
3Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate