Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Electron Concentration Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Concentration returned 3 record(s).

NumberTitle
1Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
2Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
3Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO