Piezoelectric properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Piezoelectric properties returned 5 record(s).

Number	Title
1	Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2	Ferroelectricity in hafnia controlled via surface electrochemical state
3	A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
4	Sub-7-nm textured ZrO2 with giant ferroelectricity
5	Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition