Barrier Height Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Barrier Height returned 5 record(s).

Number	Title
1	Plasma-assisted atomic layer deposition of TiN/Al₂O₃ stacks for metal-oxide-semiconductor capacitor applications
2	Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
3	Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO₂ and Ta-Based Amorphous Metals
4	Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al₂O₃ Thin Films
5	Highly transparent low capacitance plasma enhanced atomic layer deposition Al₂O₃-HfO₂ tunnel junction engineering