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Modal properties of a strip-loaded horizontal slot waveguide

Type:
Journal
Info:
Journal of the European Optical Society-Rapid Publications (2017) 13:37
Date:
2017-11-13
DOI:
http://dx.doi.org/10.1186/s41476-017-0065-5

Author Information

Name Institution
Ségolène PélissetUniversity of Eastern Finland
Janne LaukkanenUniversity of Eastern Finland
Markku KuittinenUniversity of Eastern Finland
Seppo HonkanenUniversity of Eastern Finland
Matthieu RousseyUniversity of Eastern Finland

Films

Plasma SiO2

Hardware used: Beneq TFS-200
AP-LTO 330
CAS#: 0-0-0
O2, Oxygen
CAS#: 7782-44-7
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 150C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam VASE

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Substrates

TiO2

Notes

1101