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Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition

Type:
Journal
Info:
Coatings 2020, 10, 692
Date:
2020-07-18
DOI:
http://dx.doi.org/10.3390/coatings10070692

Author Information

Name Institution
Jong Hyeon WonSeoul National University of Science and Technology
Seong Ho HanKorea Research Institute of Chemical Technology
Bo Keun ParkKorea Research Institute of Chemical Technology
Taek-Mo ChungKorea Research Institute of Chemical Technology
Jeong Hwan HanSeoul National University of Science and Technology

Films

Plasma SnO2

Hardware used: Unknown
Sn(dmamp)2, bis(1-dimethylamino-2-methyl-2-propoxide)Sn
CAS#: 0-0-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 100-300C

Plasma SnO2

Hardware used: Unknown
Sn(dmamp)2, bis(1-dimethylamino-2-methyl-2-propoxide)Sn
CAS#: 0-0-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 100-300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Film Sense FS-1EX

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Film Sense FS-1EX

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Compositional Depth Profiling
Analysis: SIMS, Secondary Ion Mass Spectrometry
Diagnostic: CAMECA IMS 4FE7

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: Analytik Jena SPECORD 200

Characteristic: Optical Bandgap
Analysis: UV-VIS Spectroscopy
Diagnostic: Analytik Jena SPECORD 200

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-8000

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Rigaku D/Max-2500

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-3000

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-3000

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-3000

Substrates

Silicon
soda lime glass

Notes

1611