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Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization

Type:

Other

Info:

Final technical report to Office of the Chief of Naval Research

Date:

1996-09-01

DOI:

http://www.dtic.mil/dtic/tr/fulltext/u2/a252352.pdf

Author Information

Name	Institution
R. F. Davis	North Carolina State University
S. Bedair	North Carolina State University
N. A. El-Masry	North Carolina State University
Z. Sitar	North Carolina State University