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Opportunities of Atomic Layer Deposition for Perovskite Solar Cells

Type:

Journal

Info:

228th ECS Meeting, October 11-15, 2015

Date:

2015-10-11

DOI:

https://ecs.confex.com/ecs/228/webprogram/Paper59172.html

Author Information

Name	Institution
Valerio Zardetto	Eindhoven University of Technology
Francesco Di Giacomo	University of Rome - Tor Vergata
M. A. Mohammed	Eindhoven University of Technology
G. Lucarelli	University of Rome - Tor Vergata
Stefano Razza	University of Rome - Tor Vergata
Alessandra D'Epifanio	University of Rome - Tor Vergata
Silvia Licoccia	University of Rome - Tor Vergata
Erwin (W.M.M.) Kessels	Eindhoven University of Technology
Aldo Di Carlo	University of Rome - Tor Vergata
Thomas M. Brown	University of Rome - Tor Vergata
Mariadriana Creatore	Eindhoven University of Technology

Films

Plasma TiO₂

Hardware used: Oxford Instruments FlexAL

Ti(C_p^Me)(NMe₂)₃, Tris(dimethylamido)methylcyclopentadienyl titanium

CAS#: 0-0-0

CAS#: 7782-44-7

Deposition Temperature = 150C

Film/Plasma Properties

Substrates

ITO

Notes

421