Inductively coupled plasma sources from Plasma ALD, LLC.


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Fixed-Gap Tunnel Junction for Reading DNA Nucleotides

Type:
Journal
Info:
ACS Nano, 2014, 8 (12), pp 11994-12003
Date:
2014-11-07

Author Information

Name Institution
Pei PangArizona State University

Films

Plasma Al2O3

Hardware used: Custom


CAS#: 7782-44-7

Film/Plasma Properties

Substrates

Notes

211