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Qimeng Jiang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qimeng Jiang returned 3 record(s).

NumberTitle
1ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
2600 V High-Performance AlGaN/GaN HEMTs with AlN/SiNx Passivation
3Characterization of SiNx/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition