Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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M. Althobaiti Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Althobaiti returned 2 record(s).

NumberTitle
1Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
2Hafnia and alumina on sulphur passivated germanium